@inproceedings{ee86a903d3424c70a95cce737922c4d2,
title = "Influence of the growth conditions on the building in processes of rare earth doping elements in silicon layer during the molecular beam epitaxy",
author = "Shengurov, \{V. G.\} and S.P. Svetlov and V.Yu. Chalkov and G.A. Maksimov and Krasilnik, \{Z. F.\} and B.A. Andreev and Stepikhova, \{Margarita V.\} and Leopold Palmetshofer and Heinz Ellmer",
year = "2001",
language = "English",
volume = "65",
series = "Izvestiya Akademii Nauk. Ser. Fizicheskaya",
pages = "289--291",
booktitle = "Proc. Russ. Acad. Sciences, Ser. of Physics",
edition = "2",
}