Influence of High Temperature Annealings on a-SiC:H Thin Film Properties

Tobias Frischmuth, David Dergez, Marko Stübegger, Ursula Hedenig, Thomas Grille, Ulrich Schmid

    Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

    Original languageEnglish
    Title of host publicationSmart Systems Integration
    Pages475-478
    Number of pages4
    Publication statusPublished - Mar 2014

    Fields of science

    • 101 Mathematics
    • 102 Computer Sciences
    • 202 Electrical Engineering, Electronics, Information Engineering
    • 202009 Electrical drive engineering
    • 202027 Mechatronics
    • 202034 Control engineering
    • 202036 Sensor systems
    • 203 Mechanical Engineering
    • 203033 Hydraulic drive technology

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