In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control

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@article{5a2dfd91f7c54b728940f945901c3228,

title = "In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control",

author = "Kurt Hingerl and Alberta Bonanni and David Stifter and Klaus Schmidegg and Helmut Sitter and {Montaigne Ramil}, Alberto",

year = "2003",

doi = "10.1016/S0022-0248(02)01863-8",

language = "English",

volume = "249",

pages = "211--215",

journal = "Journal of Crystal Growth",

issn = "1873-5002",

}

TY - JOUR

T1 - In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control

AU - Hingerl, Kurt

AU - Bonanni, Alberta

AU - Stifter, David

AU - Schmidegg, Klaus

AU - Sitter, Helmut

AU - Montaigne Ramil, Alberto

PY - 2003

Y1 - 2003

U2 - 10.1016/S0022-0248(02)01863-8

DO - 10.1016/S0022-0248(02)01863-8

M3 - Article

SN - 1873-5002

VL - 249

SP - 211

EP - 215

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -