@article{83a9d8eb8f7d453e985d3b79b7afebaa,
title = "In situ spectroscopic ellipsometry as a sensor for hard coatings and steel nitriding",
author = "Claudia Weithaler and Kurt Hingerl and Alberta Bonanni and H. St{\"o}ri and W. Werner and David Stifter and B. Gruska and G. Prunel and V. Delaire and T. Sanvito and Julia Brenner",
year = "2002",
month = aug,
doi = "10.1002/sia.1387",
language = "English",
volume = "34",
pages = "681--685",
journal = "Surface and Interface Analysis",
issn = "1096-9918",
publisher = "Wiley",
number = "1",
}