In situ spectroscopic ellipsometry as a sensor for hard coatings and steel nitriding

Claudia Weithaler, Kurt Hingerl, Alberta Bonanni, H. Störi, W. Werner, David Stifter, B. Gruska, G. Prunel, V. Delaire, T. Sanvito, Julia Brenner

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Pages (from-to)681-685
Number of pages5
JournalSurface and Interface Analysis
Volume34
Issue number1
DOIs
Publication statusPublished - Aug 2002

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 210006 Nanotechnology
  • 103040 Photonics
  • 202032 Photovoltaics

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