In situ optical analysis of low-temperature MOCVD GaN nucleation layer formation via multiple wavelength ellipsometry

Helmut Sitter; Klaus Schmidegg; David Stifter; Alberta Bonanni; Gerold Neuwirt

doi:10.1016/j.jcrysgro.2004.09.011

In situ optical analysis of low-temperature MOCVD GaN nucleation layer formation via multiple wavelength ellipsometry

Helmut Sitter
, Klaus Schmidegg
, David Stifter
, Alberta Bonanni
, Gerold Neuwirt

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	106-110
Number of pages	5
Journal	Journal of Crystal Growth
Volume	272
Issue number	1-4 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.jcrysgro.2004.09.011
Publication status	Published - 10 Dec 2004

Fields of science

103 Physics, Astronomy
103008 Experimental physics
103020 Surface physics
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

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10.1016/j.jcrysgro.2004.09.011

Cite this

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title = "In situ optical analysis of low-temperature MOCVD GaN nucleation layer formation via multiple wavelength ellipsometry",

author = "Helmut Sitter and Klaus Schmidegg and David Stifter and Alberta Bonanni and Gerold Neuwirt",

year = "2004",

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doi = "10.1016/j.jcrysgro.2004.09.011",

language = "English",

volume = "272",

pages = "106--110",

journal = "Journal of Crystal Growth",

issn = "1873-5002",

number = "1-4 SPEC. ISS.",

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TY - JOUR

T1 - In situ optical analysis of low-temperature MOCVD GaN nucleation layer formation via multiple wavelength ellipsometry

AU - Sitter, Helmut

AU - Schmidegg, Klaus

AU - Stifter, David

AU - Bonanni, Alberta

AU - Neuwirt, Gerold

PY - 2004/12/10

Y1 - 2004/12/10

UR - https://www.scopus.com/pages/publications/9944264459

U2 - 10.1016/j.jcrysgro.2004.09.011

DO - 10.1016/j.jcrysgro.2004.09.011

M3 - Article

SN - 1873-5002

VL - 272

SP - 106

EP - 110

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4 SPEC. ISS.

ER -

In situ optical analysis of low-temperature MOCVD GaN nucleation layer formation via multiple wavelength ellipsometry

Fields of science

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