@article{bcc35e1e67744ce38de2df775c6959a3,
title = "In situ investigations of Si and Ge interdiffusion in Ge-rich Si/SiGe multilayers using x-ray scattering",
author = "Falub, \{Claudiu V.\} and Detlev Gr{\"u}tzmacher and G{\"u}nther Bauer and Jiri Novak and Mojmir Meduna and S. Tsujino and Vaclav Holy",
year = "2007",
month = apr,
day = "1",
doi = "10.1088/0268-1242/22/4/026",
language = "English",
volume = "22",
pages = "447--453",
journal = "Semiconductor Science and Technology",
issn = "0268-1242",
publisher = "IOP Publishing",
number = "4",
}