In situ investigations of Si and Ge interdiffusion in Ge-rich Si/SiGe multilayers using x-ray scattering

Claudiu V. Falub, Detlev Grützmacher, Günther Bauer, Jiri Novak, Mojmir Meduna, S. Tsujino, Vaclav Holy

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Article number026
Pages (from-to)447-453
Number of pages7
JournalSemiconductor Science and Technology
Volume22
Issue number4
DOIs
Publication statusPublished - 01 Apr 2007

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

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