In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction

Clemens Peter Simbrunner; Klaus Schmidegg; Alberta Bonanni; A. Kharchenko; J. Bethke; J. Woitok; K. Lischka; Helmut Sitter

doi:10.1002/pssa.200565137

In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction

Clemens Peter Simbrunner
, Klaus Schmidegg
, Alberta Bonanni
, A. Kharchenko
, J. Bethke
, J. Woitok
, K. Lischka
, Helmut Sitter

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1704-1707
Number of pages	4
Journal	Physica Status Solidi A: Applications and Materials Science
Volume	203
Issue number	7
DOIs	https://doi.org/10.1002/pssa.200565137
Publication status	Published - May 2006

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
210006 Nanotechnology
103040 Photonics
202032 Photovoltaics

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10.1002/pssa.200565137

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Simbrunner, C. P., Schmidegg, K., Bonanni, A., Kharchenko, A., Bethke, J., Woitok, J., Lischka, K., & Sitter, H. (2006). In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction. Physica Status Solidi A: Applications and Materials Science, 203(7), 1704-1707. https://doi.org/10.1002/pssa.200565137

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title = "In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction",

author = "Simbrunner, \{Clemens Peter\} and Klaus Schmidegg and Alberta Bonanni and A. Kharchenko and J. Bethke and J. Woitok and K. Lischka and Helmut Sitter",

year = "2006",

month = may,

doi = "10.1002/pssa.200565137",

language = "English",

volume = "203",

pages = "1704--1707",

journal = "Physica Status Solidi A: Applications and Materials Science",

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Simbrunner, CP, Schmidegg, K, Bonanni, A, Kharchenko, A, Bethke, J, Woitok, J, Lischka, K & Sitter, H 2006, 'In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction', Physica Status Solidi A: Applications and Materials Science, vol. 203, no. 7, pp. 1704-1707. https://doi.org/10.1002/pssa.200565137

In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction. / Simbrunner, Clemens Peter; Schmidegg, Klaus; Bonanni, Alberta et al.
In: Physica Status Solidi A: Applications and Materials Science, Vol. 203, No. 7, 05.2006, p. 1704-1707.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction

AU - Simbrunner, Clemens Peter

AU - Schmidegg, Klaus

AU - Bonanni, Alberta

AU - Kharchenko, A.

AU - Bethke, J.

AU - Woitok, J.

AU - Lischka, K.

AU - Sitter, Helmut

PY - 2006/5

Y1 - 2006/5

UR - https://www.scopus.com/pages/publications/33745035249

U2 - 10.1002/pssa.200565137

DO - 10.1002/pssa.200565137

M3 - Article

SN - 1862-6319

VL - 203

SP - 1704

EP - 1707

JO - Physica Status Solidi A: Applications and Materials Science

JF - Physica Status Solidi A: Applications and Materials Science

IS - 7

ER -

In-situ and real-time monitoring of MOCVD growth of III-nitrides by simultaneous multi-wavelength-ellipsometry and X-ray diffraction

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