In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	50th Annual Technical Conference Proceedings
Publisher	Socitey of Vacuum Coaters
Pages	677-680
Number of pages	4
ISBN (Print)	0737-5921
Publication status	Published - 2007

Name	Proceedings of the annual technical conference
ISSN (Print)	0737-5921

Fields of science

@inproceedings{c6f07a7208ee4227bf2b9e43d615f70d,

title = "In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution",

author = "Klaus Schmidegg and Martin Bergsmann and Michael Hohage and Lidong Sun and Peter Zeppenfeld",

year = "2007",

language = "English",

isbn = "0737-5921",

series = "Proceedings of the annual technical conference",

publisher = "Socitey of Vacuum Coaters",

pages = "677--680",

booktitle = "50th Annual Technical Conference Proceedings",

}

In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution. / Schmidegg, Klaus; Bergsmann, Martin; Hohage, Michael et al.
50th Annual Technical Conference Proceedings. Socitey of Vacuum Coaters, 2007. p. 677-680 (Proceedings of the annual technical conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - In-line monitoring of ultra-thin metallic films on PET substrates with sub-nm resolution

AU - Schmidegg, Klaus

AU - Bergsmann, Martin

AU - Hohage, Michael

AU - Sun, Lidong

AU - Zeppenfeld, Peter

PY - 2007

Y1 - 2007

M3 - Conference proceedings

SN - 0737-5921

T3 - Proceedings of the annual technical conference

SP - 677

EP - 680

BT - 50th Annual Technical Conference Proceedings

PB - Socitey of Vacuum Coaters

ER -