Implementation of Highly Resistive Emitter Solar Cells in a Production Environment using an Inline Doping System

W. Wille, Ralph Rothemund, G. Meinhardt, Wolfgang Jantsch

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	Gettering and Defect Engineering in Semiconductor Technology XIV
Pages	441-445
Number of pages	5
Volume	178-179
Publication status	Published - 2011

Name	Sol. State Phenomena

Fields of science

This output contributes to the following UN Sustainable Development Goals (SDGs)

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author = "W. Wille and Ralph Rothemund and G. Meinhardt and Wolfgang Jantsch",

year = "2011",

language = "English",

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series = "Sol. State Phenomena",

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Implementation of Highly Resistive Emitter Solar Cells in a Production Environment using an Inline Doping System. / Wille, W.; Rothemund, Ralph; Meinhardt, G. et al.
Gettering and Defect Engineering in Semiconductor Technology XIV. Vol. 178-179 2011. p. 441-445 (Sol. State Phenomena).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

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AU - Meinhardt, G.

AU - Jantsch, Wolfgang

PY - 2011

Y1 - 2011

M3 - Conference proceedings

VL - 178-179

T3 - Sol. State Phenomena

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BT - Gettering and Defect Engineering in Semiconductor Technology XIV

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