Impedance-spectroscopy-supported microchannel flow rate sensor

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

We show the evaluation of electrical parameters of liquids inside a Polydimethylsiloxane (PDMS) microchannel. We utilize electrochemical impedance spectroscopy (EIS), a suitable equivalent circuit diagram, describing the electrical parameters of the liquid filled channel and parameter fitting to gain access to said parameters. The influence of the volume flow and conductivity of the liquid on the impedance spectrum will be shown in the corresponding Bode- and Nyquist plots, thus leading to an alteration of the fitting parameters in the equivalent circuit. The evaluation of this parameters, for both conductivity and flow rate simultaneously, will enable the adjustment for the influence of different conductivity liquids on the equivalent circuit parameters for flow rate measurements.
Original languageEnglish
Title of host publicationProceedings of IEEE Apscon
Editors IEEE
Number of pages4
Publication statusPublished - Feb 2024

Fields of science

  • 202012 Electrical measurement technology
  • 202036 Sensor systems
  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202037 Signal processing
  • 203016 Measurement engineering

JKU Focus areas

  • Digital Transformation

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