Impact of lamp instability on rotating compensator based ellipsometry

Chunguang Hu, Lidong Sun, Peter Zeppenfeld, Xiao Tang Hu

Research output: Contribution to journal › Article › peer-review

Fields of science

@article{127fbee5e55049979dc4d80812567b2b,

title = "Impact of lamp instability on rotating compensator based ellipsometry",

author = "Chunguang Hu and Lidong Sun and Peter Zeppenfeld and Hu, {Xiao Tang}",

year = "2009",

doi = "10.1117/12.837430",

language = "English",

volume = "7506",

pages = "750617",

journal = "Proceedings of SPIE",

issn = "0277-786X",

}

TY - JOUR

T1 - Impact of lamp instability on rotating compensator based ellipsometry

AU - Hu, Chunguang

AU - Sun, Lidong

AU - Zeppenfeld, Peter

AU - Hu, Xiao Tang

PY - 2009

Y1 - 2009

UR - http://spiedigitallibrary.org/proceedings/resource/2/psisdg/7506/1/750617_1?isAuthorized=no

U2 - 10.1117/12.837430

DO - 10.1117/12.837430

M3 - Article

SN - 0277-786X

VL - 7506

SP - 750617

JO - Proceedings of SPIE

JF - Proceedings of SPIE

ER -