Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer

Bernd Arminger; Bernhard Zagar

Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer

Institute of Measurement Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

In our proposed paper we present a technique for characterising the piezodriven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is introduced and verified by the experimental results. Also guidance for an online or offline correction of the sensors position is presented.

Original language	English
Title of host publication	Scanning Microscopy 2009
Number of pages	9
Publication status	Published - 2009

Fields of science

202024 Laser technology
202037 Signal processing
203016 Measurement engineering

JKU Focus areas

Mechatronics and Information Processing

Cite this

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title = "Identification of scanning probe microscopes sensor heads and validation of a mechanical model by a laser vibrometer",

abstract = "In our proposed paper we present a technique for characterising the piezodriven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is introduced and verified by the experimental results. Also guidance for an online or offline correction of the sensors position is presented.",

author = "Bernd Arminger and Bernhard Zagar",

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language = "English",

booktitle = "Scanning Microscopy 2009",

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AU - Zagar, Bernhard

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AB - In our proposed paper we present a technique for characterising the piezodriven sensor head of a scanning probe microscope (SPM) using a laser vibrometer. The experimental setup, the signal processing and some experimental results are described. Furthermore a mechanical model for the sensor head is introduced and verified by the experimental results. Also guidance for an online or offline correction of the sensors position is presented.

M3 - Conference proceedings

BT - Scanning Microscopy 2009

ER -