Identification of doping profiles in semiconductor devices

Martin Burger; P. Pietra; Peter Markowich; Heinz Engl

doi:10.1088/0266-5611/17/6/315

Identification of doping profiles in semiconductor devices

Martin Burger, P. Pietra, Peter Markowich, Heinz Engl

Industrial Mathematics Institute

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1765-1795
Number of pages	31
Journal	Inverse Problems
Volume	17
Issue number	6
DOIs	https://doi.org/10.1088/0266-5611/17/6/315
Publication status	Published - Dec 2001

Fields of science

101 Mathematics
101020 Technical mathematics

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@article{d1848fc6e59c4bfa9ec9ee40f3a57a21,

title = "Identification of doping profiles in semiconductor devices",

author = "Martin Burger and P. Pietra and Peter Markowich and Heinz Engl",

year = "2001",

month = dec,

doi = "10.1088/0266-5611/17/6/315",

language = "English",

volume = "17",

pages = "1765--1795",

journal = "Inverse Problems",

issn = "0266-5611",

publisher = "IOP Publishing Ltd",

number = "6",

}

TY - JOUR

T1 - Identification of doping profiles in semiconductor devices

AU - Burger, Martin

AU - Pietra, P.

AU - Markowich, Peter

AU - Engl, Heinz

PY - 2001/12

Y1 - 2001/12

UR - https://www.scopus.com/pages/publications/0035665674

U2 - 10.1088/0266-5611/17/6/315

DO - 10.1088/0266-5611/17/6/315

M3 - Article

SN - 0266-5611

VL - 17

SP - 1765

EP - 1795

JO - Inverse Problems

JF - Inverse Problems

IS - 6

ER -

Identification of doping profiles in semiconductor devices

Fields of science

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