Halogen lamp-assisted high rate deposition of both hard and elastic carbon films from CH2I2

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	274-279
Number of pages	6
Journal	Nuclear Instruments and Methods in Physics Research Section B
Volume	192
Issue number	3
DOIs	https://doi.org/10.1016/s0168-583x(01)01168-5
Publication status	Published - May 2002

Fields of science

@article{7bf92e3cc4a641edadc5b75fdcc7e6d3,

title = "Halogen lamp-assisted high rate deposition of both hard and elastic carbon films from CH2I2",

author = "M. Lindstam and Mats Boman and Klaus Piglmayer",

year = "2002",

month = may,

doi = "10.1016/s0168-583x(01)01168-5",

language = "English",

volume = "192",

pages = "274--279",

journal = "Nuclear Instruments and Methods in Physics Research Section B",

issn = "1872-9584",

publisher = "Elsevier",

number = "3",

}

TY - JOUR

T1 - Halogen lamp-assisted high rate deposition of both hard and elastic carbon films from CH2I2

AU - Lindstam, M.

AU - Boman, Mats

AU - Piglmayer, Klaus

PY - 2002/5

Y1 - 2002/5

UR - https://www.scopus.com/pages/publications/0036576322

U2 - 10.1016/s0168-583x(01)01168-5

DO - 10.1016/s0168-583x(01)01168-5

M3 - Article

SN - 1872-9584

VL - 192

SP - 274

EP - 279

JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

IS - 3

ER -