Growth Kinetics of Laser Chemical Vapor Deposited Tungsten

Tamas Szörényi, Klaus Piglmayer, Dieter Bäuerle

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings

Abstract

International Conference on Laser Induced Chemistry, Sept. 1989, Bechyné, CSSR

Original language	English
Title of host publication	International Conference on Laser Induced Chemistry
Number of pages	9
Volume	Sept. 1989
Publication status	Published - 1989

Name	Internatl. Conf. on Laser-Induced Chemistry

@inproceedings{57ed6a97ecd74120b03930862e33f254,

title = "Growth Kinetics of Laser Chemical Vapor Deposited Tungsten",

abstract = "International Conference on Laser Induced Chemistry, Sept. 1989, Bechyn{\'e}, CSSR",

author = "Tamas Sz{\"o}r{\'e}nyi and Klaus Piglmayer and Dieter B{\"a}uerle",

year = "1989",

language = "English",

volume = "Sept. 1989",

series = "Internatl. Conf. on Laser-Induced Chemistry",

booktitle = "International Conference on Laser Induced Chemistry",

}

TY - GEN

T1 - Growth Kinetics of Laser Chemical Vapor Deposited Tungsten

AU - Szörényi, Tamas

AU - Piglmayer, Klaus

AU - Bäuerle, Dieter

PY - 1989

Y1 - 1989

N2 - International Conference on Laser Induced Chemistry, Sept. 1989, Bechyné, CSSR

AB - International Conference on Laser Induced Chemistry, Sept. 1989, Bechyné, CSSR

M3 - Conference proceedings

VL - Sept. 1989

T3 - Internatl. Conf. on Laser-Induced Chemistry

BT - International Conference on Laser Induced Chemistry

ER -