Growth Kinetics of Laser Chemical Vapor Deposited Tungsten

Tamas Szörényi, Klaus Piglmayer, Dieter Bäuerle

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	505
Number of pages	4
Journal	Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy
Volume	46A
Publication status	Published - 1990

Fields of science

@article{644637082a294068833da889d048e441,

title = "Growth Kinetics of Laser Chemical Vapor Deposited Tungsten",

author = "Tamas Sz{\"o}r{\'e}nyi and Klaus Piglmayer and Dieter B{\"a}uerle",

year = "1990",

language = "English",

volume = "46A",

pages = "505",

journal = "Spectrochimica Acta Part A: Molecular and Biomolecular Spectroscopy",

issn = "1386-1425",

publisher = "Elsevier",

}