Ge quantification of high Ge content relaxed buffer layers by RBS and SIMS

  • F. Sánchez-Almazán
  • , E. Napolitani
  • , A. Carnera
  • , A.V. Drigo
  • , M. Berti
  • , Julian Stangl
  • , Zhenyang Zhong
  • , Günther Bauer
  • , G. Isella
  • , H. von Känel

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)301-308
Number of pages8
JournalNuclear Instruments and Methods in Physics Research Section B
Volume226
Issue number3
DOIs
Publication statusPublished - Nov 2004

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

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