Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement

F. Keplinger; R. Beigelbeck; F. Kohl; S. Kvasnica; A. Jachimowicz; B. Jakoby

doi:10.1109/SENSOR.2005.1496496

Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement

F. Keplinger, R. Beigelbeck, F. Kohl, S. Kvasnica, A. Jachimowicz, B. Jakoby

Vienna University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.
Pages	630-635
Volume	1
DOIs	https://doi.org/10.1109/SENSOR.2005.1496496
Publication status	Published - 2005
Externally published	Yes

Fields of science

202 Electrical Engineering, Electronics, Information Engineering

Access to Document

10.1109/SENSOR.2005.1496496

Cite this

Keplinger, F., Beigelbeck, R., Kohl, F., Kvasnica, S., Jachimowicz, A., & Jakoby, B. (2005). Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. (Vol. 1, pp. 630-635). Article 2E4.45 https://doi.org/10.1109/SENSOR.2005.1496496

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title = "Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement",

keywords = "Frequency, Transient analysis, Magnetic field measurement, Arm, Magnetic sensors, Vibration measurement, Sensor systems, Density measurement, Gold, Actuators",

author = "F. Keplinger and R. Beigelbeck and F. Kohl and S. Kvasnica and A. Jachimowicz and B. Jakoby",

year = "2005",

doi = "10.1109/SENSOR.2005.1496496",

language = "English",

volume = "1",

pages = "630--635",

booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.",

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Keplinger, F, Beigelbeck, R, Kohl, F, Kvasnica, S, Jachimowicz, A & Jakoby, B 2005, Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement. in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.. vol. 1, 2E4.45, pp. 630-635. https://doi.org/10.1109/SENSOR.2005.1496496

Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement. / Keplinger, F.; Beigelbeck, R.; Kohl, F. et al.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.. Vol. 1 2005. p. 630-635 2E4.45.

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement

AU - Keplinger, F.

AU - Beigelbeck, R.

AU - Kohl, F.

AU - Kvasnica, S.

AU - Jachimowicz, A.

AU - Jakoby, B.

PY - 2005

Y1 - 2005

KW - Frequency

KW - Transient analysis

KW - Magnetic field measurement

KW - Arm

KW - Magnetic sensors

KW - Vibration measurement

KW - Sensor systems

KW - Density measurement

KW - Gold

KW - Actuators

U2 - 10.1109/SENSOR.2005.1496496

DO - 10.1109/SENSOR.2005.1496496

M3 - Conference proceedings

VL - 1

SP - 630

EP - 635

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.

ER -

Keplinger F, Beigelbeck R, Kohl F, Kvasnica S, Jachimowicz A, Jakoby B. Frequency and transient analysis of micromachined U-shaped cantilever devices for magnetic field measurement. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.. Vol. 1. 2005. p. 630-635. 2E4.45 doi: 10.1109/SENSOR.2005.1496496