@inproceedings{7a962e4313f84a639e1087013713a9af,
title = "Frequency Analysis of Dopant Profiling and Capacitance Spectroscopy Using Scanning Microwave Microscopy",
author = "Enrico Brinciotti and Campagnaro, \{Giulio Maria\} and Giorgio Badino and Manuel Kasper and Georg Gramse and Tuca, \{Silviu Sorin\} and J. Smoliner and Thomas Schweinboeck and Soeren Hommel and Ferry Kienberger",
year = "2017",
month = jan,
doi = "10.1109/TNANO.2016.2628206",
language = "English",
volume = "16",
pages = "75--82",
booktitle = "IEEE Transactions on Nanotechnology",
publisher = "IEEE",
}