Fluid Property Sensors

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Abstract

This chapter treats the measurement of physical fluid properties using miniaturized devices. The most practical approach is to measure the frequency response of immersed or partly exposed mechanical resonators. Depending on the technology used, the mechanical response can be measured optically or in the electrical domain utilizing piezoelectric, piezoresistive, or electrodynamic coupling mechanisms. Spurious signal components have to be handled accordingly to enable a proper interpretation of the data. The fluid parameters which are accessible by this method are the mass-density, the complex viscosity at the frequency of oscillation (or equivalently, the linear viscoelastic storage and loss moduli), and the speed of sound if compressibility of the fluid is of relevance in the considered frequency range. The specific form of the fluid-structure-interaction as a consequence of the resonance mode-shape determines how these parameters affect the sensor response function and whether a separation of the individual parameters is possible or not.
Original languageEnglish
Title of host publicationResonant MEMS: Fundamentals, Implementation, and Application
Editors Oliver Brand (Editor), Isabelle Dufour (Editor), Stephen Heinrich (Editor), Fabien Josse (Editor), Gary K. Fedder (Series Editor), Christofer Hierold (Series Editor), Jan G. Korvink (Series Editor), O
Place of PublicationWeinheim, Germany
PublisherWiley-VCH
Pages427-449
Number of pages23
ISBN (Print)978-3-527-33545-9
Publication statusPublished - Apr 2015

Publication series

NameAdvanced Micro & Nanosystems

Fields of science

  • 202021 Industrial electronics
  • 202036 Sensor systems
  • 203017 Micromechanics
  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202027 Mechatronics
  • 202028 Microelectronics
  • 202037 Signal processing

JKU Focus areas

  • Mechatronics and Information Processing

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