Fabrication process of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner; P. Lindner; Iris Bergmair; Michael Mühlberger; Kurt Hingerl; H Schmidt; E.-B. Kley; Rainer Schöftner

Fabrication process of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner
, P. Lindner
, Iris Bergmair
, Michael Mühlberger
, Kurt Hingerl
, H Schmidt
, E.-B. Kley
, Rainer Schöftner

Institute of Semiconductor and Solid State Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings

Original language	English
Title of host publication	Proc. SPIE
Pages	659103/1-7
Number of pages	7
Volume	6591
Publication status	Published - 2007

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 7 Affordable and Clean Energy

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

Cite this

@inproceedings{3dcdaa59d4a840c2acc42b0f9b132dd0,

title = "Fabrication process of 3D-photonic crystals via UV-nanoimprint lithography",

author = "Thomas Glinsner and P. Lindner and Iris Bergmair and Michael M{\"u}hlberger and Kurt Hingerl and H Schmidt and E.-B. Kley and Rainer Sch{\"o}ftner",

year = "2007",

language = "English",

volume = "6591",

pages = "659103/1--7",

booktitle = "Proc. SPIE",

}