Fabrication of silicon 3D taper structures for optical fibre to chip interface

Roman Holly, P. Hudek, R. Merz, Kurt Hingerl

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1248-1251
Number of pages	4
Journal	Microelectronic Engineering
Volume	84
DOIs	https://doi.org/10.1016/j.mee.2007.01.156
Publication status	Published - 2007

Fields of science

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title = "Fabrication of silicon 3D taper structures for optical fibre to chip interface",

author = "Roman Holly and P. Hudek and R. Merz and Kurt Hingerl",

year = "2007",

doi = "10.1016/j.mee.2007.01.156",

language = "English",

volume = "84",

pages = "1248--1251",

journal = "Microelectronic Engineering",

issn = "1873-5568",

publisher = "ELSEVIER SCIENCE BV",

}

TY - JOUR

T1 - Fabrication of silicon 3D taper structures for optical fibre to chip interface

AU - Holly, Roman

AU - Hudek, P.

AU - Merz, R.

AU - Hingerl, Kurt

PY - 2007

Y1 - 2007

U2 - 10.1016/j.mee.2007.01.156

DO - 10.1016/j.mee.2007.01.156

M3 - Article

SN - 1873-5568

VL - 84

SP - 1248

EP - 1251

JO - Microelectronic Engineering

JF - Microelectronic Engineering

ER -