TY - CHAP
T1 - Fabrication of Semiconductor Quantum Dot Molecules: Droplet Epitaxy and Local Oxidation Nanolithography Techniques
AU - Alonso, Pablo
AU - Martin Sanchez, Javier
PY - 2014
Y1 - 2014
N2 - A semiconductor quantum dot molecule (QDM) composed of two interacting quantum dots (QDs) is the simplest coupled system formed by semiconductor quantum nanostructures. Potentially, a QDM is the ideal building block for the realization of a quantum computation device. However, the fabrication of QDMs is far from being a straightforward task, particularly if a precise control of QDs density, size, or spatial location is required. Recently, an important improvement in the control of these properties has been achieved by using patterned semiconductor substrates followed by preferential epitaxial growth. In this chapter we will overview two of such fabrication methods, which are based on: (1) in situ droplet epitaxy “nanodrilling” and (2) ex situ local oxidation nanolithography.
AB - A semiconductor quantum dot molecule (QDM) composed of two interacting quantum dots (QDs) is the simplest coupled system formed by semiconductor quantum nanostructures. Potentially, a QDM is the ideal building block for the realization of a quantum computation device. However, the fabrication of QDMs is far from being a straightforward task, particularly if a precise control of QDs density, size, or spatial location is required. Recently, an important improvement in the control of these properties has been achieved by using patterned semiconductor substrates followed by preferential epitaxial growth. In this chapter we will overview two of such fabrication methods, which are based on: (1) in situ droplet epitaxy “nanodrilling” and (2) ex situ local oxidation nanolithography.
U2 - 10.1007/978-1-4614-8130-0_1
DO - 10.1007/978-1-4614-8130-0_1
M3 - Chapter
SN - 978-1-4614-8130-0
VL - 14
T3 - Lecture Notes in Nanoscale Science and Technology
SP - 1
EP - 29
BT - Quantum dot molecules
A2 - Jiang Wu, Zhiming M. Wang, null
ER -