@article{9beed949e84843a887b8db892f648803,
title = "Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing",
author = "Gerald Stocker and Cristina Consani and Pooja Thakkar and Clement Fleury and Andreas Tortschanoff and Khaoula-Farah Ourak and Gerald P{\"u}hringer and Reyhaneh Jannesari and Parviz Saeidi and Elmar Aschauer and Ulf Bartl and Christoph Kovatsch and Thomas Grille and Bernhard Jakoby",
year = "2022",
month = aug,
day = "9",
doi = "10.5194/jsss-11-225-2022",
language = "English",
volume = "11",
pages = "225--231",
journal = "Journal of Sensors and Sensor Systems",
issn = "2194-8771",
publisher = "copernicus publication",
number = "2",
}