Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Gerald Stocker; Cristina Consani; Pooja Thakkar; Clement Fleury; Andreas Tortschanoff; Khaoula-Farah Ourak; Gerald Pühringer; Reyhaneh Jannesari; Parviz Saeidi; Elmar Aschauer; Ulf Bartl; Christoph Kovatsch; Thomas Grille; Bernhard Jakoby

doi:10.5194/jsss-11-225-2022

Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Gerald Stocker, Cristina Consani, Pooja Thakkar, Clement Fleury, Andreas Tortschanoff, Khaoula-Farah Ourak, Gerald Pühringer, Reyhaneh Jannesari, Parviz Saeidi, Elmar Aschauer, Ulf Bartl, Christoph Kovatsch, Thomas Grille, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	225-231
Number of pages	7
Journal	Journal of Sensors and Sensor Systems
Volume	11
Issue number	2
DOIs	https://doi.org/10.5194/jsss-11-225-2022
Publication status	Published - 09 Aug 2022

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing
502058 Digital transformation

JKU Focus areas

Digital Transformation

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10.5194/jsss-11-225-2022

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Stocker, G., Consani, C., Thakkar, P., Fleury, C., Tortschanoff, A., Ourak, K.-F., Pühringer, G., Jannesari, R., Saeidi, P., Aschauer, E., Bartl, U., Kovatsch, C., Grille, T., & Jakoby, B. (2022). Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing. Journal of Sensors and Sensor Systems, 11(2), 225-231. https://doi.org/10.5194/jsss-11-225-2022

@article{9beed949e84843a887b8db892f648803,

title = "Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing",

author = "Gerald Stocker and Cristina Consani and Pooja Thakkar and Clement Fleury and Andreas Tortschanoff and Khaoula-Farah Ourak and Gerald P{\"u}hringer and Reyhaneh Jannesari and Parviz Saeidi and Elmar Aschauer and Ulf Bartl and Christoph Kovatsch and Thomas Grille and Bernhard Jakoby",

year = "2022",

month = aug,

day = "9",

doi = "10.5194/jsss-11-225-2022",

language = "English",

volume = "11",

pages = "225--231",

journal = "Journal of Sensors and Sensor Systems",

issn = "2194-8771",

publisher = "copernicus publication",

number = "2",

}

Stocker, G, Consani, C, Thakkar, P, Fleury, C, Tortschanoff, A, Ourak, K-F, Pühringer, G, Jannesari, R, Saeidi, P, Aschauer, E, Bartl, U, Kovatsch, C, Grille, T & Jakoby, B 2022, 'Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing', Journal of Sensors and Sensor Systems, vol. 11, no. 2, pp. 225-231. https://doi.org/10.5194/jsss-11-225-2022

TY - JOUR

T1 - Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

AU - Stocker, Gerald

AU - Consani, Cristina

AU - Thakkar, Pooja

AU - Fleury, Clement

AU - Tortschanoff, Andreas

AU - Ourak, Khaoula-Farah

AU - Pühringer, Gerald

AU - Jannesari, Reyhaneh

AU - Saeidi, Parviz

AU - Aschauer, Elmar

AU - Bartl, Ulf

AU - Kovatsch, Christoph

AU - Grille, Thomas

AU - Jakoby, Bernhard

PY - 2022/8/9

Y1 - 2022/8/9

UR - http://www.scopus.com/inward/record.url?scp=85136790318&partnerID=8YFLogxK

U2 - 10.5194/jsss-11-225-2022

DO - 10.5194/jsss-11-225-2022

M3 - Article

SN - 2194-8771

VL - 11

SP - 225

EP - 231

JO - Journal of Sensors and Sensor Systems

JF - Journal of Sensors and Sensor Systems

IS - 2

ER -

Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Fields of science

JKU Focus areas

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