@inproceedings{af20a2a8997c4c15a7ba3981e3fe0512,
title = "Fabrication of integrated poly-silicon wave guides for mid-infrared absorption spectroscopy using the evanescent field",
author = "Gerald Stocker and Cristina Consani and Pooja Thakkar and Andreas Tortschanoff and Clement Fleury and Gerald P{\"u}hringer and Reyhaneh Jannesari and Parviz Saeidi and Thomas Grille and Christoph Kovatsch and Ulf Bartl and Elmar Aschauer and Bernhard Jakoby",
year = "2022",
month = feb,
language = "English",
editor = "VDE",
booktitle = "MikroSystemTechnik Congress 2021",
}