Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner; P. Lindner; Iris Bergmair; Michael Mühlberger; Kurt Hingerl; H. Schmid; E.-B. Kley; Rainer Schöftner

doi:10.1116/1.2798733

Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner, P. Lindner, Iris Bergmair, Michael Mühlberger, Kurt Hingerl, H. Schmid, E.-B. Kley, Rainer Schöftner

Institute of Semiconductor and Solid State Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2337-2340
Number of pages	4
Journal	Journal of Vacuum Science and Technology B
Volume	25
Issue number	6
DOIs	https://doi.org/10.1116/1.2798733
Publication status	Published - 2007

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1116/1.2798733

Cite this

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title = "Fabrication of 3D-photonic crystals via UV-nanoimprint lithography",

author = "Thomas Glinsner and P. Lindner and Iris Bergmair and Michael M{\"u}hlberger and Kurt Hingerl and H. Schmid and E.-B. Kley and Rainer Sch{\"o}ftner",

year = "2007",

doi = "10.1116/1.2798733",

language = "English",

volume = "25",

pages = "2337--2340",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

number = "6",

}

TY - JOUR

T1 - Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

AU - Glinsner, Thomas

AU - Lindner, P.

AU - Bergmair, Iris

AU - Mühlberger, Michael

AU - Hingerl, Kurt

AU - Schmid, H.

AU - Kley, E.-B.

AU - Schöftner, Rainer

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/37149012661

U2 - 10.1116/1.2798733

DO - 10.1116/1.2798733

M3 - Article

SN - 1520-8567

VL - 25

SP - 2337

EP - 2340

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 6

ER -

Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Fields of science

UN SDGs

Access to Document

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Cite this