Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner; P. Lindner; Iris Bergmair; Michael Mühlberger; Kurt Hingerl; H. Schmid; E.-B. Kley; Rainer Schöftner

doi:10.1116/1.2798733

Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

Thomas Glinsner
, P. Lindner
, Iris Bergmair
, Michael Mühlberger
, Kurt Hingerl
, H. Schmid
, E.-B. Kley
, Rainer Schöftner

Institute of Semiconductor and Solid State Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	2337-2340
Number of pages	4
Journal	Journal of Vacuum Science and Technology B
Volume	25
Issue number	6
DOIs	https://doi.org/10.1116/1.2798733
Publication status	Published - 2007

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

Access to Document

10.1116/1.2798733

Cite this

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title = "Fabrication of 3D-photonic crystals via UV-nanoimprint lithography",

author = "Thomas Glinsner and P. Lindner and Iris Bergmair and Michael M{\"u}hlberger and Kurt Hingerl and H. Schmid and E.-B. Kley and Rainer Sch{\"o}ftner",

year = "2007",

doi = "10.1116/1.2798733",

language = "English",

volume = "25",

pages = "2337--2340",

journal = "Journal of Vacuum Science and Technology B",

issn = "1520-8567",

number = "6",

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TY - JOUR

T1 - Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

AU - Glinsner, Thomas

AU - Lindner, P.

AU - Bergmair, Iris

AU - Mühlberger, Michael

AU - Hingerl, Kurt

AU - Schmid, H.

AU - Kley, E.-B.

AU - Schöftner, Rainer

PY - 2007

Y1 - 2007

UR - https://www.scopus.com/pages/publications/37149012661

U2 - 10.1116/1.2798733

DO - 10.1116/1.2798733

M3 - Article

SN - 1520-8567

VL - 25

SP - 2337

EP - 2340

JO - Journal of Vacuum Science and Technology B

JF - Journal of Vacuum Science and Technology B

IS - 6

ER -

Fabrication of 3D-photonic crystals via UV-nanoimprint lithography

UN SDGs

Fields of science

Access to Document

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Cite this