Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

Jasmin Spettel; Gerald Stocker; Thang Duy Dao; Reyhaneh Jannesari; Andreas Tortschanoff; Parviz Saeidi; Gerald Pühringer; Florian Dubois; Clement Fleury; Cristina Consani; Thomas Grille; Elmar Aschauer; Mohssen Moridi; Bernhard Jakoby

doi:10.1088/1742-6596/2015/1/012149

Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

Jasmin Spettel, Gerald Stocker, Thang Duy Dao, Reyhaneh Jannesari, Andreas Tortschanoff, Parviz Saeidi, Gerald Pühringer, Florian Dubois, Clement Fleury, Cristina Consani, Thomas Grille, Elmar Aschauer, Mohssen Moridi, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

Original language	English
Title of host publication	Journal of Physics Conference Series
Editors	6th International Conference on Metamaterials and Nanophotonics METANANO 2021
Publisher	IOP Publishing
Number of pages	5
Volume	2015
Edition	1
DOIs	https://doi.org/10.1088/1742-6596/2015/1/012149
Publication status	Published - 2021

Publication series

Name	Journal of Physics: Conference Series
ISSN (Print)	1742-6588

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing
502058 Digital transformation

JKU Focus areas

Digital Transformation

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10.1088/1742-6596/2015/1/012149

Cite this

Spettel, J., Stocker, G., Dao, T. D., Jannesari, R., Tortschanoff, A., Saeidi, P., Pühringer, G., Dubois, F., Fleury, C., Consani, C., Grille, T., Aschauer, E., Moridi, M., & Jakoby, B. (2021). Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications. In 6th International Conference on Metamaterials and Nanophotonics METANANO 2021 (Ed.), Journal of Physics Conference Series (1 ed., Vol. 2015). (Journal of Physics: Conference Series). IOP Publishing. https://doi.org/10.1088/1742-6596/2015/1/012149

Spettel, Jasmin ; Stocker, Gerald ; Dao, Thang Duy et al. / Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications. Journal of Physics Conference Series. editor / 6th International Conference on Metamaterials and Nanophotonics METANANO 2021. Vol. 2015 1. ed. IOP Publishing, 2021. (Journal of Physics: Conference Series).

@inproceedings{79b375fcc59449cca93b81603faa3b3f,

title = "Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications",

abstract = "We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.",

author = "Jasmin Spettel and Gerald Stocker and Dao, {Thang Duy} and Reyhaneh Jannesari and Andreas Tortschanoff and Parviz Saeidi and Gerald P{\"u}hringer and Florian Dubois and Clement Fleury and Cristina Consani and Thomas Grille and Elmar Aschauer and Mohssen Moridi and Bernhard Jakoby",

year = "2021",

doi = "10.1088/1742-6596/2015/1/012149",

language = "English",

volume = "2015",

series = "Journal of Physics: Conference Series",

publisher = "IOP Publishing",

editor = "{6th International Conference on Metamaterials and Nanophotonics METANANO 2021}",

booktitle = "Journal of Physics Conference Series",

edition = "1",

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Spettel, J, Stocker, G, Dao, TD, Jannesari, R, Tortschanoff, A, Saeidi, P, Pühringer, G, Dubois, F, Fleury, C, Consani, C, Grille, T, Aschauer, E, Moridi, M & Jakoby, B 2021, Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications. in 6th International Conference on Metamaterials and Nanophotonics METANANO 2021 (ed.), Journal of Physics Conference Series. 1 edn, vol. 2015, Journal of Physics: Conference Series, IOP Publishing. https://doi.org/10.1088/1742-6596/2015/1/012149

Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications. / Spettel, Jasmin; Stocker, Gerald; Dao, Thang Duy et al.
Journal of Physics Conference Series. ed. / 6th International Conference on Metamaterials and Nanophotonics METANANO 2021. Vol. 2015 1. ed. IOP Publishing, 2021. (Journal of Physics: Conference Series).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

TY - GEN

T1 - Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

AU - Spettel, Jasmin

AU - Stocker, Gerald

AU - Dao, Thang Duy

AU - Jannesari, Reyhaneh

AU - Tortschanoff, Andreas

AU - Saeidi, Parviz

AU - Pühringer, Gerald

AU - Dubois, Florian

AU - Fleury, Clement

AU - Consani, Cristina

AU - Grille, Thomas

AU - Aschauer, Elmar

AU - Moridi, Mohssen

AU - Jakoby, Bernhard

PY - 2021

Y1 - 2021

N2 - We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

AB - We numerically and experimentally investigate aluminum metal (Al), gold-tin (AuSn) and titanium-tungsten (TiW) metallic alloys as plasmonic materials in the mid-infrared (MIR) region using spectroscopic ellipsometry and reflection measurements of gratings. The angle dependence of the specular reflectance of shallow gratings is investigated using a free-beam measurement setup and compared to simulations. It is shown that the deep and narrow resonances observed for all three materials match the associated prediction from simulations.

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DO - 10.1088/1742-6596/2015/1/012149

M3 - Conference proceedings

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T3 - Journal of Physics: Conference Series

BT - Journal of Physics Conference Series

A2 - 6th International Conference on Metamaterials and Nanophotonics METANANO 2021, null

PB - IOP Publishing

ER -

Spettel J, Stocker G, Dao TD, Jannesari R, Tortschanoff A, Saeidi P et al. Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications. In 6th International Conference on Metamaterials and Nanophotonics METANANO 2021, editor, Journal of Physics Conference Series. 1 ed. Vol. 2015. IOP Publishing. 2021. (Journal of Physics: Conference Series). doi: 10.1088/1742-6596/2015/1/012149

Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

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Fabrication and characterization of aluminum, gold-tin and titanium-tungsten alloys for mid-infrared plasmonic applications

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