Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer

Rafael Ecker; Tina Mitteramskogler; Bernhard Jakoby

doi:10.1109/JSEN.2025.3589775

Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer

Rafael Ecker^*, Tina Mitteramskogler, Bernhard Jakoby

^*Corresponding author for this work

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Original language	English
Article number	11091379
Pages (from-to)	32293-32300
Number of pages	8
Journal	IEEE Sensors Journal
Volume	25
Issue number	17
DOIs	https://doi.org/10.1109/JSEN.2025.3589775
Publication status	Published - Sept 2025

Fields of science

202 Electrical Engineering, Electronics, Information Engineering
202028 Microelectronics
202027 Mechatronics
202019 High frequency engineering
202037 Signal processing
203017 Micromechanics
502058 Digital transformation
202036 Sensor systems
202021 Industrial electronics

JKU Focus areas

Digital Transformation

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10.1109/JSEN.2025.3589775

Cite this

@article{3a9c6a48088545b8ab931b65b9b75f76,

title = "Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer",

keywords = "leaf gold electrode, microfluidic flow sensor, PMMA bonding, temperature sensor, ultrathin PMMA layer",

author = "Rafael Ecker and Tina Mitteramskogler and Bernhard Jakoby",

note = "Publisher Copyright: {\textcopyright} 2001-2012 IEEE.",

year = "2025",

month = sep,

doi = "10.1109/JSEN.2025.3589775",

language = "English",

volume = "25",

pages = "32293--32300",

journal = "IEEE Sensors Journal",

issn = "1530-437X",

publisher = "IEEE",

number = "17",

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T1 - Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer

AU - Ecker, Rafael

AU - Mitteramskogler, Tina

AU - Jakoby, Bernhard

PY - 2025/9

Y1 - 2025/9

KW - leaf gold electrode

KW - microfluidic flow sensor

KW - PMMA bonding

KW - temperature sensor

KW - ultrathin PMMA layer

UR - https://www.scopus.com/pages/publications/105011681588

U2 - 10.1109/JSEN.2025.3589775

DO - 10.1109/JSEN.2025.3589775

M3 - Article

AN - SCOPUS:105011681588

SN - 1530-437X

VL - 25

SP - 32293

EP - 32300

JO - IEEE Sensors Journal

JF - IEEE Sensors Journal

IS - 17

M1 - 11091379

ER -

Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer

Fields of science

JKU Focus areas

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LCM - Center for Symbiotic Mechatronics - Förderphase 2

Cite this

Fabrication and Characterization of a Microfluidic Flow Sensor Integrated into an Ultrathin PMMA Layer

Fields of science

JKU Focus areas

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Projects

LCM - Center for Symbiotic Mechatronics - Förderphase 2

Cite this