Abstract
Electrodynamically driven resonators upon immer- sion in a sample liquid which can be used as viscosity and mass density sensors are presented. The most promising concepts for such resonant sensors include devices which are fabricated in technologies involving clamped wire and plate structures. In this contribution, achievable accuracies for these types of resonating sensors are considered and investigated by means of long term measurement series. As a suitable reference for such devices, a steel tuning fork is used, which serves as a frequency standard in low frequency applications (440 Hz). Such tuning forks can serve as viscosity and density sensors themselves if they are immersed in a liquid. In order to make their frequency response electronically accessible, an electromagnetic driving and readout setup has been devised to compare their performance to the wire- and plate-based sensors.
Original language | English |
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Title of host publication | Proceedings of the IEEE Sensors Conference 2013, Baltimore, USA |
Number of pages | 4 |
Publication status | Published - 2013 |
Fields of science
- 203017 Micromechanics
- 202019 High frequency engineering
- 202028 Microelectronics
- 202039 Theoretical electrical engineering
- 202037 Signal processing
- 202027 Mechatronics
- 202036 Sensor systems
JKU Focus areas
- Mechatronics and Information Processing