Excimer-Laser-Induced Synthesis and Surface Modifications of Materials

Dieter Bäuerle, Enno Arenholz, Franz Fölser, Johannes Heitz, A. Kochemasov, Peter Schwab

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Excimer Lasers and New Trends in Laser Microtechnology
Editors	S. Metev, G. Sepold
Place of Publication	Bamberg
Publisher	Meisenbach Verlag
Pages	139
Number of pages	8
Publication status	Published - 1993

Fields of science

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title = "Excimer-Laser-Induced Synthesis and Surface Modifications of Materials",

author = "Dieter B{\"a}uerle and Enno Arenholz and Franz F{\"o}lser and Johannes Heitz and A. Kochemasov and Peter Schwab",

year = "1993",

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TY - CHAP

T1 - Excimer-Laser-Induced Synthesis and Surface Modifications of Materials

AU - Bäuerle, Dieter

AU - Arenholz, Enno

AU - Fölser, Franz

AU - Heitz, Johannes

AU - Kochemasov, A.

AU - Schwab, Peter

PY - 1993

Y1 - 1993

M3 - Chapter

SP - 139

BT - Excimer Lasers and New Trends in Laser Microtechnology

A2 - S. Metev, G. Sepold, null

PB - Meisenbach Verlag

CY - Bamberg

ER -