Equalising stamp and substrate deformations in solid parallel-plate UV-based nanoimprint lithography

Iris Bergmair, Rainer Schöftner, Michael Mühlberger, Markus Gusenbauer, Kurt Hingerl

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	822
Number of pages	3
Journal	Microelectronic Engineering
Volume	85
DOIs	https://doi.org/10.1016/j.mee.2007.12.079
Publication status	Published - 2008

Fields of science

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title = "Equalising stamp and substrate deformations in solid parallel-plate UV-based nanoimprint lithography",

author = "Iris Bergmair and Rainer Sch{\"o}ftner and Michael M{\"u}hlberger and Markus Gusenbauer and Kurt Hingerl",

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T1 - Equalising stamp and substrate deformations in solid parallel-plate UV-based nanoimprint lithography

AU - Bergmair, Iris

AU - Schöftner, Rainer

AU - Mühlberger, Michael

AU - Gusenbauer, Markus

AU - Hingerl, Kurt

PY - 2008

Y1 - 2008

UR - http://www.zona.jku.at

U2 - 10.1016/j.mee.2007.12.079

DO - 10.1016/j.mee.2007.12.079

M3 - Article

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VL - 85

SP - 822

JO - Microelectronic Engineering

JF - Microelectronic Engineering

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