Epitaxial growth at high rates with LEPECVD

Günther Bauer; T. Graf; H. von Känel; C. Rosenblad; J. Schulze; Julian Stangl; Y. Zhuang

doi:10.1016/S0040-6090(98)01216-4

Epitaxial growth at high rates with LEPECVD

Günther Bauer
, T. Graf
, H. von Känel
, C. Rosenblad
, J. Schulze
, Julian Stangl
, Y. Zhuang

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	89-91
Number of pages	3
Journal	Thin Solid Films
Volume	336
Issue number	1-2
DOIs	https://doi.org/10.1016/S0040-6090(98)01216-4
Publication status	Published - 30 Dec 1998

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

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10.1016/S0040-6090(98)01216-4

Cite this

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title = "Epitaxial growth at high rates with LEPECVD",

author = "G{\"u}nther Bauer and T. Graf and \{von K{\"a}nel\}, H. and C. Rosenblad and J. Schulze and Julian Stangl and Y. Zhuang",

year = "1998",

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day = "30",

doi = "10.1016/S0040-6090(98)01216-4",

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TY - JOUR

T1 - Epitaxial growth at high rates with LEPECVD

AU - Bauer, Günther

AU - Graf, T.

AU - von Känel, H.

AU - Rosenblad, C.

AU - Schulze, J.

AU - Stangl, Julian

AU - Zhuang, Y.

PY - 1998/12/30

Y1 - 1998/12/30

UR - https://www.scopus.com/pages/publications/0032309465

U2 - 10.1016/S0040-6090(98)01216-4

DO - 10.1016/S0040-6090(98)01216-4

M3 - Article

VL - 336

SP - 89

EP - 91

JO - Thin Solid Films

JF - Thin Solid Films

IS - 1-2

ER -

Epitaxial growth at high rates with LEPECVD

Fields of science

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