Epitaxial growth at high rates with LEPECVD

Günther Bauer, T. Graf, H. von Känel, C. Rosenblad, J. Schulze, Julian Stangl, Y. Zhuang

Research output: Contribution to journal › Article › peer-review

Original languageEnglish
JournalThin Solid Films
Publication statusPublished - 1998

Fields of science

  • 103 Physics, Astronomy
  • 103009 Solid state physics
  • 103011 Semiconductor physics
  • 103017 Magnetism
  • 103018 Materials physics
  • 103040 Photonics
  • 202032 Photovoltaics
  • 210006 Nanotechnology

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