@article{bd44bbf6e9704d84ba8a40da2e80cc35,
title = "Ellipsometric characterization of CrTiAlN coating deposited at low temperatures by unbalanced magnetron sputtering",
author = "Vasilliy Chitanov and L. Kolaklieva and T. Cholakova and Reza Sharif and G{\"u}nter Hesser and Andreas Hinterreiter and R. Kakanakov and Kurt Hingerl",
year = "2020",
month = jun,
day = "2",
doi = "10.1088/1742-6596/1492/1/012035",
language = "English",
volume = "1492",
journal = "Journal of Physics: Conference Series",
issn = "1742-6596",
publisher = "IoP",
number = "1",
}