Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

Thomas Lederer; Martin Heinisch; Wolfgang Hilber; Bernhard Jakoby

doi:10.4071/1551-4897-6.4.205

Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

Thomas Lederer
, Martin Heinisch
, Wolfgang Hilber
, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	205-210
Number of pages	6
Journal	Journal of Microelectronics and Electronic Packaging
Volume	6
Issue number	4
DOIs	https://doi.org/10.4071/1551-4897-6.4.205
Publication status	Published - 2009

Fields of science

203017 Micromechanics
202019 High frequency engineering
202028 Microelectronics
202039 Theoretical electrical engineering
202037 Signal processing
202027 Mechatronics
202036 Sensor systems

JKU Focus areas

Mechatronics and Information Processing

Access to Document

10.4071/1551-4897-6.4.205

Cite this

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title = "Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke",

author = "Thomas Lederer and Martin Heinisch and Wolfgang Hilber and Bernhard Jakoby",

year = "2009",

doi = "10.4071/1551-4897-6.4.205",

language = "English",

volume = "6",

pages = "205--210",

journal = "Journal of Microelectronics and Electronic Packaging",

issn = "1551-4897",

publisher = "Int. Microelectronics and Packaging Society",

number = "4",

}

TY - JOUR

T1 - Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

AU - Lederer, Thomas

AU - Heinisch, Martin

AU - Hilber, Wolfgang

AU - Jakoby, Bernhard

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/84890694358

U2 - 10.4071/1551-4897-6.4.205

DO - 10.4071/1551-4897-6.4.205

M3 - Article

SN - 1551-4897

VL - 6

SP - 205

EP - 210

JO - Journal of Microelectronics and Electronic Packaging

JF - Journal of Microelectronics and Electronic Packaging

IS - 4

ER -

Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

Fields of science

JKU Focus areas

Access to Document

Other files and links

Dynamic capillary systems towards disposable fluid probes

Cite this

Electromagnetically Actuated Membrane-Based Micropumps with Integrated Magnetic Yoke

Fields of science

JKU Focus areas

Access to Document

Other files and links

Projects

Dynamic capillary systems towards disposable fluid probes

Cite this