Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing

Frieder Lucklum; Bernhard Jakoby

doi:10.1109/TUFFC.2010.1511

Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing

Frieder Lucklum, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Contribution to journal › Article › peer-review

Abstract

Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of non-contact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.

Original language	English
Article number	5456248
Pages (from-to)	1000-1002
Number of pages	3
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	57
Issue number	5
DOIs	https://doi.org/10.1109/TUFFC.2010.1511
Publication status	Published - May 2010

Fields of science

202036 Sensor systems

Access to Document

10.1109/TUFFC.2010.1511

Cite this

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title = "Electromagnetic-Acoustic High-Q Silicon Resonators for Liquid Phase Sensing",

abstract = "Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of non-contact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.",

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AB - Piezoelectric and electrostatic excitation are the standard transduction methods of ultrasonic sensors. However, electromagnetic-acoustic transduction has been demonstrated as a suitable alternative with unique advantages of non-contact excitation and multi-mode vibration in inexpensive materials, such as thin metal plates. We have also demonstrated the use of high-Q silicon membranes as resonator elements. Here, we report on the utilization of these devices as liquid phase sensors for density and viscosity measurements.

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