@article{437b5a23cffa4b2f9173b77c41d61150,
title = "Elastic relaxation of dry-etched Si/SiGe quantum dots",
author = "G{\"u}nther Bauer and Darhuber, \{A. A.\} and Th. Grill and D.J. Lockwood and J.-P. Noel and Julian Stangl and Torres, \{C.M. Sotomayor\} and P.D. Wang",
year = "1998",
doi = "10.1103/PhysRevB.58.4825",
language = "English",
volume = "58",
pages = "4825--4831",
journal = "Physical Review B: Condensed Matter and Materials Physics",
issn = "1550-235X",
publisher = "The American Physical Society",
number = "8",
}