Doping of silicon layers from a sublimating Erbium source in Molecular Beam Epitaxy

B.A. Andreev, V.Yu. Chalkov, Heinz Ellmer, Z. F. Krasilnik, G.A. Maksimov, V. G. Shengurov, Margarita V. Stepikhova, S.P. Svetlov, E.A. Uskova

Research output: Contribution to journal › Article › peer-review

Original languageEnglish
Pages (from-to)41
JournalTechnical Physics Letters
Volume26
Publication statusPublished - 2000

Fields of science

  • 103 Physics, Astronomy
  • 103008 Experimental physics
  • 103020 Surface physics
  • 103005 Atomic physics
  • 103009 Solid state physics
  • 103013 Ion physics
  • 103015 Condensed matter
  • 103017 Magnetism
  • 103018 Materials physics
  • 103021 Optics
  • 103023 Polymer physics
  • 104014 Surface chemistry
  • 104018 Polymer chemistry
  • 503015 Subject didactics of technical sciences
  • 202012 Electrical measurement technology
  • 202036 Sensor systems
  • 203016 Measurement engineering
  • 210001 Nanoanalytics
  • 210004 Nanomaterials

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