Donor Activity of Ion-implanted Erbium in Silicon

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	479-482
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	127-128
DOIs	https://doi.org/10.1016/S0168-583X(96)00974-3
Publication status	Published - May 1997

Fields of science

@article{ead22fdd0cf049d1ad8df163403e9810,

title = "Donor Activity of Ion-implanted Erbium in Silicon",

author = "Leopold Palmetshofer and Y. Suprun-Belevich and Stepikhova, \{Margarita V.\}",

year = "1997",

month = may,

doi = "10.1016/S0168-583X(96)00974-3",

language = "English",

volume = "127-128",

pages = "479--482",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

}

TY - JOUR

T1 - Donor Activity of Ion-implanted Erbium in Silicon

AU - Palmetshofer, Leopold

AU - Suprun-Belevich, Y.

AU - Stepikhova, Margarita V.

PY - 1997/5

Y1 - 1997/5

UR - https://www.scopus.com/pages/publications/0031547876

U2 - 10.1016/S0168-583X(96)00974-3

DO - 10.1016/S0168-583X(96)00974-3

M3 - Article

VL - 127-128

SP - 479

EP - 482

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -