Discretization effects in electron beam lithography studied by high resolution x-ray reciprocal space mapping

Günther Bauer, A. A. Darhuber, C.M. Sotomayor Torres, P.D. Wang

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@article{ea519c0171ae4468bac8fe9b17c2faaf,

title = "Discretization effects in electron beam lithography studied by high resolution x-ray reciprocal space mapping",

author = "G{\"u}nther Bauer and Darhuber, {A. A.} and Torres, {C.M. Sotomayor} and P.D. Wang",

year = "1998",

language = "English",

journal = "Journal of Applied Physics",

publisher = "American Institute of Physics",

}