Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope

K. Osvay; Z. Bor; B. Racz; Johannes Heitz

doi:10.1007/BF00324377

Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope

K. Osvay
, Z. Bor
, B. Racz
, Johannes Heitz

Institute of Applied Physics

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	211-214
Number of pages	4
Journal	Applied Physics A
Volume	58
Issue number	3
DOIs	https://doi.org/10.1007/BF00324377
Publication status	Published - Mar 1994

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Fields of science

103016 Laser physics
103020 Surface physics
103 Physics, Astronomy
103008 Experimental physics
103021 Optics
103023 Polymer physics

JKU Focus areas

Engineering and Natural Sciences (in general)

Access to Document

10.1007/BF00324377

Cite this

@article{bc53d99a46b248dabd5b3319ce44aacb,

title = "Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope",

author = "K. Osvay and Z. Bor and B. Racz and Johannes Heitz",

year = "1994",

month = mar,

doi = "10.1007/BF00324377",

language = "English",

volume = "58",

pages = "211--214",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

number = "3",

}

TY - JOUR

T1 - Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope

AU - Osvay, K.

AU - Bor, Z.

AU - Racz, B.

AU - Heitz, Johannes

PY - 1994/3

Y1 - 1994/3

UR - https://www.scopus.com/pages/publications/0028392763

U2 - 10.1007/BF00324377

DO - 10.1007/BF00324377

M3 - Article

SN - 1432-0630

VL - 58

SP - 211

EP - 214

JO - Applied Physics A

JF - Applied Physics A

IS - 3

ER -

Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope

UN SDGs

Fields of science

JKU Focus areas

Access to Document

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Cite this