Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope

K. Osvay, Z. Bor, B. Racz, Johannes Heitz

Research output: Contribution to journal › Article › peer-review

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@article{bc53d99a46b248dabd5b3319ce44aacb,

title = "Direct Writing and In-Situ Material Processing by a Laser-Micromachining Projection Microscope",

author = "K. Osvay and Z. Bor and B. Racz and Johannes Heitz",

year = "1994",

doi = "10.1007/BF00324377",

language = "English",

volume = "58",

pages = "211--214",

journal = "Applied Physics A",

issn = "1432-0630",

publisher = "Springer Verlag",

}