Diffusion and clustering of supersaturated carbon in SiGe layers under oxidation

A. Coati; Julian Stangl; Günther Bauer; C. Spinella; D. De Salvador; James C. Sturm; M. Berti; M.S. Carroll; A.V. Drigo; E. Napolitani

Diffusion and clustering of supersaturated carbon in SiGe layers under oxidation

A. Coati, Julian Stangl, Günther Bauer, C. Spinella, D. De Salvador, James C. Sturm, M. Berti, M.S. Carroll, A.V. Drigo, E. Napolitani

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	212-217
Journal	Nuclear Instruments and Methods in Physics Research Section B
Volume	186
Publication status	Published - 2002

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

Cite this

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title = "Diffusion and clustering of supersaturated carbon in SiGe layers under oxidation",

author = "A. Coati and Julian Stangl and G{\"u}nther Bauer and C. Spinella and {De Salvador}, D. and Sturm, {James C.} and M. Berti and M.S. Carroll and A.V. Drigo and E. Napolitani",

year = "2002",

language = "English",

volume = "186",

pages = "212--217",

journal = "Nuclear Instruments and Methods in Physics Research Section B",

issn = "1872-9584",

publisher = "Elsevier",

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TY - JOUR

T1 - Diffusion and clustering of supersaturated carbon in SiGe layers under oxidation

AU - Coati, A.

AU - Stangl, Julian

AU - Bauer, Günther

AU - Spinella, C.

AU - De Salvador, D.

AU - Sturm, James C.

AU - Berti, M.

AU - Carroll, M.S.

AU - Drigo, A.V.

AU - Napolitani, E.

PY - 2002

Y1 - 2002

M3 - Article

SN - 1872-9584

VL - 186

SP - 212

EP - 217

JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

ER -