Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

Günther Bauer; A. A. Darhuber; J. Grim; Vaclav Holy; J. Kubena; Friedrich Schäffler; Julian Stangl; Stefan Zerlauth

Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

Günther Bauer, A. A. Darhuber, J. Grim, Vaclav Holy, J. Kubena, Friedrich Schäffler, Julian Stangl, Stefan Zerlauth

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Physics D: Applied Physics
Publication status	Published - 1999

Fields of science

103 Physics, Astronomy
103009 Solid state physics
103011 Semiconductor physics
103017 Magnetism
103018 Materials physics
103040 Photonics
202032 Photovoltaics
210006 Nanotechnology

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Cite this

@article{1fe0f0c698624dba8500cf7d656e4818,

title = "Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers",

author = "G{\"u}nther Bauer and Darhuber, {A. A.} and J. Grim and Vaclav Holy and J. Kubena and Friedrich Sch{\"a}ffler and Julian Stangl and Stefan Zerlauth",

year = "1999",

language = "English",

journal = "Journal of Physics D: Applied Physics",

publisher = "IOP Publishing Ltd, UK",

}

TY - JOUR

T1 - Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

AU - Bauer, Günther

AU - Darhuber, A. A.

AU - Grim, J.

AU - Holy, Vaclav

AU - Kubena, J.

AU - Schäffler, Friedrich

AU - Stangl, Julian

AU - Zerlauth, Stefan

PY - 1999

Y1 - 1999

M3 - Article

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

ER -