Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

V. Hnatowicz; V. Perina; A. Mackova; Vaclav Svorcik; V. Rybka; D. Fink; Johannes Heitz

doi:10.1016/S0168-583X(00)00557-7

Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

V. Hnatowicz
, V. Perina
, A. Mackova
, Vaclav Svorcik
, V. Rybka
, D. Fink
, Johannes Heitz

Institute of Applied Physics

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	437-441
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research Section B
Volume	175-177
DOIs	https://doi.org/10.1016/S0168-583X(00)00557-7
Publication status	Published - Apr 2001

Fields of science

103016 Laser physics
210005 Nanophotonics

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10.1016/S0168-583X(00)00557-7

Cite this

@article{d276ce8bda32405d978694cd8b12b3b5,

title = "Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions",

author = "V. Hnatowicz and V. Perina and A. Mackova and Vaclav Svorcik and V. Rybka and D. Fink and Johannes Heitz",

year = "2001",

month = apr,

doi = "10.1016/S0168-583X(00)00557-7",

language = "English",

volume = "175-177",

pages = "437--441",

journal = "Nuclear Instruments and Methods in Physics Research Section B",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

AU - Hnatowicz, V.

AU - Perina, V.

AU - Mackova, A.

AU - Svorcik, Vaclav

AU - Rybka, V.

AU - Fink, D.

AU - Heitz, Johannes

PY - 2001/4

Y1 - 2001/4

UR - https://www.scopus.com/pages/publications/0035301870

U2 - 10.1016/S0168-583X(00)00557-7

DO - 10.1016/S0168-583X(00)00557-7

M3 - Conference article

SN - 1872-9584

VL - 175-177

SP - 437

EP - 441

JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

ER -

Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

Fields of science

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