Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

V. Hnatowicz, V. Perina, A. Mackova, Vaclav Svorcik, V. Rybka, D. Fink, Johannes Heitz

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	437-441
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research Section B
Volume	175-177
Publication status	Published - Jan 2001

Fields of science

@article{d276ce8bda32405d978694cd8b12b3b5,

title = "Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions",

author = "V. Hnatowicz and V. Perina and A. Mackova and Vaclav Svorcik and V. Rybka and D. Fink and Johannes Heitz",

year = "2001",

month = jan,

language = "English",

volume = "175-177",

pages = "437--441",

journal = "Nuclear Instruments and Methods in Physics Research Section B",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Degradation of polyimide by 100 keV He+, Ne+, Ar+ and Kr+ ions

AU - Hnatowicz, V.

AU - Perina, V.

AU - Mackova, A.

AU - Svorcik, Vaclav

AU - Rybka, V.

AU - Fink, D.

AU - Heitz, Johannes

PY - 2001/1

Y1 - 2001/1

M3 - Article

SN - 1872-9584

VL - 175-177

SP - 437

EP - 441

JO - Nuclear Instruments and Methods in Physics Research Section B

JF - Nuclear Instruments and Methods in Physics Research Section B

ER -