Defect Production in Si by Ion Bombardment under the Influence of Internal Mechanical Strain

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	557-560
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Volume	115
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(95)01516-7
Publication status	Published - 1996

Fields of science

@article{d16ac7c278ee43c4ade423cfd99acf0c,

title = "Defect Production in Si by Ion Bombardment under the Influence of Internal Mechanical Strain",

author = "Y. Suprun-Belevich and Leopold Palmetshofer",

year = "1996",

doi = "10.1016/0168-583X(95)01516-7",

language = "English",

volume = "115",

pages = "557--560",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

number = "1-4",

}

TY - JOUR

T1 - Defect Production in Si by Ion Bombardment under the Influence of Internal Mechanical Strain

AU - Suprun-Belevich, Y.

AU - Palmetshofer, Leopold

PY - 1996

Y1 - 1996

U2 - 10.1016/0168-583X(95)01516-7

DO - 10.1016/0168-583X(95)01516-7

M3 - Article

VL - 115

SP - 557

EP - 560

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -