Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator

Martin Heinisch; Thomas Voglhuber-Brunnmaier; Erwin Reichel; Stefan Clara; Ali Abdallah; Bernhard Jakoby

doi:10.1109/MESS.2014.7010256

Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator

Martin Heinisch, Thomas Voglhuber-Brunnmaier, Erwin Reichel, Stefan Clara, Ali Abdallah, Bernhard Jakoby

Institute of Microelectronics and Microsensors

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

Abstract

In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.

Original language	English
Title of host publication	Proceedings of the Microelectronic Systems Symposium 2014
Number of pages	5
ISBN (Electronic)	9781479953264
DOIs	https://doi.org/10.1109/MESS.2014.7010256
Publication status	Published - May 2014

Publication series

Name	2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings

Fields of science

202019 High frequency engineering
202021 Industrial electronics
202036 Sensor systems
203017 Micromechanics
202 Electrical Engineering, Electronics, Information Engineering
202027 Mechatronics
202028 Microelectronics
202037 Signal processing

JKU Focus areas

Mechatronics and Information Processing

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10.1109/MESS.2014.7010256

Cite this

Heinisch, M., Voglhuber-Brunnmaier, T., Reichel, E., Clara, S., Abdallah, A., & Jakoby, B. (2014). Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator. In Proceedings of the Microelectronic Systems Symposium 2014 Article 7010256 (2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings). https://doi.org/10.1109/MESS.2014.7010256

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abstract = "In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.",

author = "Martin Heinisch and Thomas Voglhuber-Brunnmaier and Erwin Reichel and Stefan Clara and Ali Abdallah and Bernhard Jakoby",

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Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator. / Heinisch, Martin; Voglhuber-Brunnmaier, Thomas; Reichel, Erwin et al.
Proceedings of the Microelectronic Systems Symposium 2014. 2014. 7010256 (2014 Microelectronic Systems Symposium, MESS 2014 - Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference proceedings › peer-review

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AU - Clara, Stefan

AU - Abdallah, Ali

AU - Jakoby, Bernhard

PY - 2014/5

Y1 - 2014/5

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AB - In this contribution a concept study for an electrody- namically driven and read-out torsional oscillator is pre- sented. The fundamental mechanical and electrodynami- cal theory is explained in detail and measurements results obtained with first prototypes are discussed.

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M3 - Conference proceedings

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Concept Study on an Electrodynamically Driven and Read-Out Torsional Oscillator

Abstract

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