CO2 Measurement with an easy designed Bolometer

Johann Mayrwöger, Wolfgang Reichl, Christian Krutzler, Bernhard Jakoby

Research output: Chapter in Book/Report/Conference proceedingConference proceedingspeer-review

Abstract

We report on the design of a simple germanium bolometer designed as a Fabry-Perot absorbing structure, which can be used for monitoring, e.g., CO2, where no additional filter is required. CO2 is absorbs IR radiation in a major band centered around 4.26µm. The selectivity of the whole sensor-configuration is mainly accomplished by the wavelength-response associated with the Fabry-Perot structure involved. The analysis shows, that the designed bolometer has an adequate response-function for the measurement of CO2 concentration. Combining this analysis for the bolometer with ray tracing simulations for a connected sample chamber yields the response for an entire IR-absorption sensor system, which is in good agreement with measurements.
Original languageEnglish
Title of host publicationTagungsband zur Informationstagung Mikroelektronik 10
Place of PublicationEschenbachgasse 9, 1010 Wien
PublisherÖsterreichischer Verlag für Elektrotechnik
Pages131-134
Number of pages4
ISBN (Print)978-3-85133-055-7
Publication statusPublished - 2010

Publication series

NameOVE Schriftenreihe

Fields of science

  • 202 Electrical Engineering, Electronics, Information Engineering
  • 202019 High frequency engineering
  • 202021 Industrial electronics
  • 202027 Mechatronics
  • 202028 Microelectronics
  • 202036 Sensor systems
  • 202037 Signal processing
  • 203017 Micromechanics
  • 502058 Digital transformation

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